JPH01128245U - - Google Patents
Info
- Publication number
- JPH01128245U JPH01128245U JP2217488U JP2217488U JPH01128245U JP H01128245 U JPH01128245 U JP H01128245U JP 2217488 U JP2217488 U JP 2217488U JP 2217488 U JP2217488 U JP 2217488U JP H01128245 U JPH01128245 U JP H01128245U
- Authority
- JP
- Japan
- Prior art keywords
- positive resist
- developer
- developing device
- sensitivity
- correlates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000035945 sensitivity Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2217488U JPH01128245U (en]) | 1988-02-22 | 1988-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2217488U JPH01128245U (en]) | 1988-02-22 | 1988-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128245U true JPH01128245U (en]) | 1989-09-01 |
Family
ID=31240050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2217488U Pending JPH01128245U (en]) | 1988-02-22 | 1988-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128245U (en]) |
-
1988
- 1988-02-22 JP JP2217488U patent/JPH01128245U/ja active Pending